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|Title:||Optical Fiber Fabry-Perot Sensor Fabrication based on Focused Ion Beam Post-Processing|
|Authors:||Ricardo Melo André|
Manuel Joaquim Marques
|Abstract:||A combination of focused ion beam milling and chemical etching is proposed for the creation of Fabry-Perot cavities in microwires. Both simple cavities and cantilevers are created on 15 mu m-diameter microwires and characterized in temperature. The cantilever structure shows sensitivity to vibration and is capable of measuring frequencies in the range 1 Hz - 40 kHz.|
|Appears in Collections:||CAP - Articles in International Conferences|
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