Please use this identifier to cite or link to this item: http://repositorio.inesctec.pt/handle/123456789/3712
Title: Optical Fiber Fabry-Perot Sensor Fabrication based on Focused Ion Beam Post-Processing
Authors: Ricardo Melo André
Pevec,S
Becker,M
Dellith,J
Rothhardt,M
Manuel Joaquim Marques
Donlagic,D
Bartelt,H
Orlando Frazão
Issue Date: 2014
Abstract: A combination of focused ion beam milling and chemical etching is proposed for the creation of Fabry-Perot cavities in microwires. Both simple cavities and cantilevers are created on 15 mu m-diameter microwires and characterized in temperature. The cantilever structure shows sensitivity to vibration and is capable of measuring frequencies in the range 1 Hz - 40 kHz.
URI: http://repositorio.inesctec.pt/handle/123456789/3712
http://dx.doi.org/10.1117/12.2059175
metadata.dc.type: conferenceObject
Publication
Appears in Collections:CAP - Articles in International Conferences

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