Integrated Optical Devices Fabrication of Multimode Interference Devices in Fused Silica by Femtosecond Laser Direct Writing

Abstract

1xN (N=2, 3, 4) MMI power splitters were fabricated in a fused silica substrate by laser direct writing, using a focused 515 nm amplified femtosecond laser beam, and characterized at 1550 nm. To accomplish this, several low loss waveguides were fabricated side by side to form a multimode waveguide with the output in a polished facet of the substrate, while a single low loss waveguide was fabricated to inject light in the centre of the multimode waveguide. The performance of the fabricated devices was optimized by testing three different designs.