Optical Fiber Fabry-Perot Sensor Fabrication based on Focused Ion Beam Post-Processing

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Date
2014
Authors
Ricardo Melo André
Pevec,S
Becker,M
Dellith,J
Rothhardt,M
Manuel Joaquim Marques
Donlagic,D
Bartelt,H
Orlando Frazão
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Abstract
A combination of focused ion beam milling and chemical etching is proposed for the creation of Fabry-Perot cavities in microwires. Both simple cavities and cantilevers are created on 15 mu m-diameter microwires and characterized in temperature. The cantilever structure shows sensitivity to vibration and is capable of measuring frequencies in the range 1 Hz - 40 kHz.
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