Optical Fiber Fabry-Perot Sensor Fabrication based on Focused Ion Beam Post-Processing

dc.contributor.author	Ricardo Melo André	en
dc.contributor.author	Pevec,S	en
dc.contributor.author	Becker,M	en
dc.contributor.author	Dellith,J	en
dc.contributor.author	Rothhardt,M	en
dc.contributor.author	Manuel Joaquim Marques	en
dc.contributor.author	Donlagic,D	en
dc.contributor.author	Bartelt,H	en
dc.contributor.author	Orlando Frazão	en
dc.date.accessioned	2017-11-20T14:29:49Z
dc.date.available	2017-11-20T14:29:49Z
dc.date.issued	2014	en
dc.description.abstract	A combination of focused ion beam milling and chemical etching is proposed for the creation of Fabry-Perot cavities in microwires. Both simple cavities and cantilevers are created on 15 mu m-diameter microwires and characterized in temperature. The cantilever structure shows sensitivity to vibration and is capable of measuring frequencies in the range 1 Hz - 40 kHz.	en
dc.identifier.uri	http://repositorio.inesctec.pt/handle/123456789/3712
dc.identifier.uri	http://dx.doi.org/10.1117/12.2059175	en
dc.language	eng	en
dc.relation	5067	en
dc.relation	4383	en
dc.relation	4061	en
dc.rights	info:eu-repo/semantics/openAccess	en
dc.title	Optical Fiber Fabry-Perot Sensor Fabrication based on Focused Ion Beam Post-Processing	en
dc.type	conferenceObject	en
dc.type	Publication	en