Micro-cantilever displacement detection based in optical fiber tip

Abstract

This work demonstrates the potential of combining a microsphere with a tip for the functionality of the contact sensor. This sensor consists of a tip aligned with the ?ber core and a microsphere, which appears during tip formation. This new structure was produced using the electric arc machine. The sensor operation consists of the variation of the tip curvature, which causes a variation of the optical paths and, consequently, a change in the output signal. The study of this micro-cantilever consisted of an exploration of the contact mode. In addition, the sensor was characterized by temperature, which shows very low sensitivity and vibration. This last characterization was performed with two con?gurations parallel and perpendicular to the oscillating surface. The perpendicular case showed higher sensitivity and has an operating band of 0 Hz to 20 kHz. In this con?guration, for frequencies up to 2 Hz, the intensity varies linearly with the frequencies and with a sensitivity of 0.032±0.001 (Hz-1). For the parallel case, the operating band was from 1.5 kHz to 7 kHz. © 2019 by the authors. Licensee MDPI, Basel, Switzerland.