Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct Writing

dc.contributor.author João Miguel Maia en
dc.contributor.author Vítor Oliveira Amorim en
dc.contributor.author Daniel Alexandre en
dc.contributor.author Paulo Vicente Marques en
dc.contributor.other 4287 en
dc.contributor.other 4382 en
dc.contributor.other 6407 en
dc.contributor.other 6596 en
dc.date.accessioned 2023-05-05T14:11:34Z
dc.date.available 2023-05-05T14:11:34Z
dc.date.issued 2017 en
dc.description.abstract Femtosecond laser direct writing is a three dimensional fabrication technique that can be applied to produce integrated optical components with high spatial resolution or microfluidic channels when combined with HF etching. The same fabrication technique can thus be employed to produce monolithic optofluidic devices for sensing applications. One of the most common sensing schemes involves evanescent optical interaction; therefore, the channel must meet some requirements regarding surface roughness, which will depend on the laser writing conditions, as described in this paper. However, of more significance is the distance between waveguiding medium and microfluidic channel that must be accurately defined. This control can be achieved by monitoring the etching reaction of a waveguide grating written a few microns from the channel, as introduced in this paper. In addition to its function as an etching monitor, the grating can also be used as a coarse refractive index sensor device. en
dc.identifier P-00M-G2N en
dc.identifier.uri http://dx.doi.org/10.1109/jlt.2017.2678604 en
dc.identifier.uri https://repositorio.inesctec.pt/handle/123456789/13849
dc.language eng en
dc.rights info:eu-repo/semantics/openAccess en
dc.title Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct Writing en
dc.type en
dc.type Publication en
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